Characterization of semiconductor structures using scanning microwave microscopy technique

  1. Bagdad, B.A.
  2. Gamiz, F.
Actas:
Joint International EUROSOl Workshop and International Conference on Ultimate Integration on Silicon-ULIS, EUROSOI-ULIS 2017 - Proceedings

ISBN: 9781509053131

Año de publicación: 2017

Páginas: 200-203

Tipo: Aportación congreso

DOI: 10.1109/ULIS.2017.7962561 GOOGLE SCHOLAR