Effective capacitance area for pseudo-MOSFET characterization of bare SOIWafers by Split-C(V) measurements

  1. Fernandez, C.
  2. Rodriguez, N.
  3. Ohata, A.
  4. Gamiz, F.
  5. Cristoloveanu, S.
Aldizkaria:
ECS Journal of Solid State Science and Technology

ISSN: 2162-8769 2162-8777

Argitalpen urtea: 2013

Alea: 2

Zenbakia: 12

Mota: Artikulua

DOI: 10.1149/2.010312JSS GOOGLE SCHOLAR