Determination of effective capacitance area for pseudo-MOSFET based characterization of bare soi wafers by split-C(V) measurements

  1. Fernandez, C.
  2. Rodriguez, N.
  3. Ohata, A.
  4. Diab, A.
  5. Gamiz, F.
  6. Cristoloveanu, S.
Aktak:
ECS Transactions

ISSN: 1938-5862,  1938-6737

ISBN: 9781607683780

Argitalpen urtea: 2013

Alea: 53

Zenbakia: 5

Orrialdeak: 209-217

Mota: Biltzar ekarpena

DOI: 10.1149/05305.0209ECST GOOGLE SCHOLAR
Datuen iturria: Scopus