Cantilever Fabrication by a Printing and Bonding Process

  1. Rivadeneyra, A.
  2. Fernandez-Salmeron, J.
  3. Agudo-Acemel, M.
  4. Palma, A.J.
  5. Capitan-Vallvey, L.F.
  6. Lopez-Villanueva, J.A.
Revue:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Année de publication: 2015

Volumen: 24

Número: 4

Pages: 880-886

Type: Article

DOI: 10.1109/JMEMS.2014.2356611 GOOGLE SCHOLAR

Objectifs de Développement Durable

La source de données: Scopus