Reliability of film thickness extraction through CV curves of SOI p-i-n gated diodes

  1. Sasaki, Katia R. A.
  2. Navarro, Carlos
  3. Bawedin, Maryline
  4. Andrieu, Francois
  5. Martino, Joao A.
  6. Cristoloveanu, Sorin
Libro:
2015 30TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO)

ISBN: 978-1-4673-7162-9

Ano de publicación: 2015

Congreso: 30th Symposium on Microelectronics Technology and Devices (SBMicro)

Tipo: Achega congreso

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Fonte de datos: WoS