Determination of ad hoc deposited charge on bare SOI wafers
- Fernandez, C.
- Rodriguez, N.
- Marquez, C.
- Gamiz, F.
Proceedings:
EUROSOI-ULIS 2015 - 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon
ISBN: 9781479969111
Year of publication: 2015
Pages: 289-292
Type: Conference paper