Determination of ad hoc deposited charge on bare SOI wafers

  1. Fernandez, C.
  2. Rodriguez, N.
  3. Marquez, C.
  4. Gamiz, F.
Actes de conférence:
EUROSOI-ULIS 2015 - 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon

ISBN: 9781479969111

Année de publication: 2015

Pages: 289-292

Type: Communication dans un congrès

DOI: 10.1109/ULIS.2015.7063830 GOOGLE SCHOLAR
La source de données: Scopus