Improved manufacturing process for printed cantilevers by using water removable sacrificial substrate
- Rivadeneyra, A.
- Fernández-Salmerón, J.
- Agudo-Acemel, M.
- López-Villanueva, J.A.
- Capitan-Vallvey, L.F.
- Palma, A.J.
Revue:
Sensors and Actuators, A: Physical
ISSN: 0924-4247
Année de publication: 2015
Volumen: 235
Pages: 171-181
Type: Article
