Geometrical analysis of a MEMS microphone

  1. Rivadeneyra, A.
  2. Martínez-Martí, F.
  3. Palma, A.J.
  4. Banqueri, J.
  5. Bernardo, R.M.
Actes de conférence:
2012 International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design, SMACD 2012

ISBN: 9781467306867

Année de publication: 2012

Pages: 169-172

Type: Communication dans un congrès

DOI: 10.1109/SMACD.2012.6339444 GOOGLE SCHOLAR
La source de données: Scopus