Reliability of film thickness extraction through CV curves of SOI p-i-n gated diodes
- Sasaki, Katia R. A.
- Navarro, Carlos
- Bawedin, Maryline
- Andrieu, Francois
- Martino, Joao A.
- Cristoloveanu, Sorin
Libro:
2015 30TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO)
ISBN: 978-1-4673-7162-9
Año de publicación: 2015
Congreso: 30th Symposium on Microelectronics Technology and Devices (SBMicro)
Tipo: Aportación congreso