Lamb wave micromechanical resonators formed in thin plates of lithium niobate

  1. Olsson, R.H.
  2. Hattar, K.
  3. Baker, M.S.
  4. Wiwi, M.
  5. Nguyen, J.
  6. Padilla, C.
  7. Homeijer, S.J.
  8. Wendt, J.R.
  9. Friedmann, T.A.
Konferenzberichte:
Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

ISBN: 9781940470016

Datum der Publikation: 2014

Seiten: 281-284

Art: Konferenz-Beitrag

DOI: 10.31438/TRF.HH2014.75 GOOGLE SCHOLAR lock_openOpen Access editor