Lamb wave micromechanical resonators formed in thin plates of lithium niobate

  1. Olsson, R.H.
  2. Hattar, K.
  3. Baker, M.S.
  4. Wiwi, M.
  5. Nguyen, J.
  6. Padilla, C.
  7. Homeijer, S.J.
  8. Wendt, J.R.
  9. Friedmann, T.A.
Proceedings:
Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

ISBN: 9781940470016

Year of publication: 2014

Pages: 281-284

Type: Conference paper

DOI: 10.31438/TRF.HH2014.75 GOOGLE SCHOLAR lock_openOpen access editor