Lamb wave micromechanical resonators formed in thin plates of lithium niobate

  1. Olsson, R.H.
  2. Hattar, K.
  3. Baker, M.S.
  4. Wiwi, M.
  5. Nguyen, J.
  6. Padilla, C.
  7. Homeijer, S.J.
  8. Wendt, J.R.
  9. Friedmann, T.A.
Actes de conférence:
Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

ISBN: 9781940470016

Année de publication: 2014

Pages: 281-284

Type: Communication dans un congrès

DOI: 10.31438/TRF.HH2014.75 GOOGLE SCHOLAR lock_openAccès ouvert editor