Surface roughness at the Si-SiO2 interfaces in fully depleted silicon-on-insulator inversion layers

  1. Gámiz, F.
  2. Roldán, J.B.
  3. López-Villanueva, J.A.
  4. Cartujo-Cassinello, P.
  5. Carceller, J.E.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 1999

Volume: 86

Issue: 12

Pages: 6854-6863

Type: Article

DOI: 10.1063/1.371763 GOOGLE SCHOLAR