Surface roughness at the Si-SiO2 interfaces in fully depleted silicon-on-insulator inversion layers
ISSN: 0021-8979
Year of publication: 1999
Volume: 86
Issue: 12
Pages: 6854-6863
Type: Article
ISSN: 0021-8979
Year of publication: 1999
Volume: 86
Issue: 12
Pages: 6854-6863
Type: Article