Surface roughness at the Si-SiO2 interfaces in fully depleted silicon-on-insulator inversion layers
ISSN: 0021-8979
Année de publication: 1999
Volumen: 86
Número: 12
Pages: 6854-6863
Type: Article
ISSN: 0021-8979
Année de publication: 1999
Volumen: 86
Número: 12
Pages: 6854-6863
Type: Article