Influence of Punch Trough Stop Layer and Well Depths on the Robustness of Bulk FinFETs to Heavy Ions Impact

  1. Calomarde, A.
  2. Manich, S.
  3. Rubio, A.
  4. Gamiz, F.
Journal:
IEEE Access

ISSN: 2169-3536

Year of publication: 2022

Volume: 10

Pages: 47169-47178

Type: Article

DOI: 10.1109/ACCESS.2022.3171813 GOOGLE SCHOLAR lock_openOpen access editor