Influence of Punch Trough Stop Layer and Well Depths on the Robustness of Bulk FinFETs to Heavy Ions Impact

  1. Calomarde, A.
  2. Manich, S.
  3. Rubio, A.
  4. Gamiz, F.
Revue:
IEEE Access

ISSN: 2169-3536

Année de publication: 2022

Volumen: 10

Pages: 47169-47178

Type: Article

DOI: 10.1109/ACCESS.2022.3171813 GOOGLE SCHOLAR lock_openAccès ouvert editor